发明名称 Projection system
摘要 A projection system having a first tilting mirror matrix, a second tilting mirror matrix, and an imaging lens, which projects the first tilting mirror matrix onto the second tilting mirror matrix, wherein each tilting mirror matrix has multiple tilting mirrors, the tilting axes of which are positioned in a modulator surface plane. The imaging lens includes a first lens and an imaging mirror, and the imaging mirror forms an aperture stop of the imaging lens, wherein the aperture diaphragm includes an angle of other than 90° with the normal of the modulator surface of the first tilting mirror matrix without taking into account any optical path folds.
申请公布号 US8696143(B2) 申请公布日期 2014.04.15
申请号 US201313863567 申请日期 2013.04.16
申请人 CARL ZEISS AG 发明人 GEISSLER ENRICO;NIETEN CHRISTOPH;RUDOLPH GUENTER;PRETORIUS MARCO
分类号 G03B21/28 主分类号 G03B21/28
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