| 发明名称 |
Measuring member, sensor, measuring method, exposure apparatus, exposure method, and device producing method |
| 摘要 |
A measuring member has a first face and a plurality of first marks arranged on the first face. The first marks have respective orientations corresponding to their positions in a first direction. |
| 申请公布号 |
US8699014(B2) |
申请公布日期 |
2014.04.15 |
| 申请号 |
US20090591925 |
申请日期 |
2009.12.04 |
| 申请人 |
SHIRAISHI MASAYUKI;NIKON CORPORATION |
发明人 |
SHIRAISHI MASAYUKI |
| 分类号 |
G01B9/00;G03B27/32;G03B27/52;G03C5/00 |
主分类号 |
G01B9/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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