发明名称 |
THINNER FOR RINSING PHOTORESIST AND THE METHOD OF PURIFYING THE THINNER |
摘要 |
The present invention relates to a thinner composition for rinsing photoresist and a purifying method thereof, and more specifically, to a thinner composition for rinsing photoresist and a purifying method thereof, wherein an existing thinner with a single component can be substituted with a mixed thinner. The thinner composition improves economical efficiency and user convenience by improving yield and processing convenience. |
申请公布号 |
KR101384810(B1) |
申请公布日期 |
2014.04.15 |
申请号 |
KR20130096860 |
申请日期 |
2013.08.14 |
申请人 |
DUKSAN CO., LTD. |
发明人 |
LEE, BEUM JIN;LEE, WOO YONG;LEE, SEUNG YOUNG |
分类号 |
G03F7/42;H01L31/042 |
主分类号 |
G03F7/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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