发明名称 THINNER FOR RINSING PHOTORESIST AND THE METHOD OF PURIFYING THE THINNER
摘要 The present invention relates to a thinner composition for rinsing photoresist and a purifying method thereof, and more specifically, to a thinner composition for rinsing photoresist and a purifying method thereof, wherein an existing thinner with a single component can be substituted with a mixed thinner. The thinner composition improves economical efficiency and user convenience by improving yield and processing convenience.
申请公布号 KR101384810(B1) 申请公布日期 2014.04.15
申请号 KR20130096860 申请日期 2013.08.14
申请人 DUKSAN CO., LTD. 发明人 LEE, BEUM JIN;LEE, WOO YONG;LEE, SEUNG YOUNG
分类号 G03F7/42;H01L31/042 主分类号 G03F7/42
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