发明名称 |
Object moving apparatus, object processing apparatus, exposure apparatus, object inspecting apparatus and device manufacturing method |
摘要 |
A substrate is held by adsorption by a substrate holding frame that is formed into a frame shape and is lightweight, and the substrate holding frame is driven along a horizontal plane by a drive unit that includes a linear motor. Below the substrate holding frame, a plurality of air levitation units are placed that support by levitation the substrate in a noncontact manner such that the substrate is substantially horizontal, by jetting air to the lower surface of the substrate. Since the plurality of air levitation units cover a movement range of the substrate holding frame, the drive unit can guide the substrate holding frame (substrate) along the horizontal plane at high speed and with high precision. |
申请公布号 |
US8699001(B2) |
申请公布日期 |
2014.04.15 |
申请号 |
US20100855181 |
申请日期 |
2010.08.12 |
申请人 |
AOKI YASUO;HAMADA TOMOHIDE;SHIRASU HIROSHI;TOGUCHI MANABU;NIKON CORPORATION |
发明人 |
AOKI YASUO;HAMADA TOMOHIDE;SHIRASU HIROSHI;TOGUCHI MANABU |
分类号 |
G03B27/58;B65G49/06;G03F7/20;H01L21/677 |
主分类号 |
G03B27/58 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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