发明名称 Metrology system for imaging workpiece surfaces at high robot transfer speeds
摘要 A metrology system has an elongate stationary camera pixel array facing a workpiece transit path of a robot with an field of view corresponding to a workpiece diameter and extending transverse to the transit path portion, and a stationary elongate light emitting array generally parallel to the pixel array. An image control processor causes the camera to capture successive image frames while the robot is moving the workpiece through the transit path.
申请公布号 US8698889(B2) 申请公布日期 2014.04.15
申请号 US20100707335 申请日期 2010.02.17
申请人 RAVID ABRAHAM;EGAN TODD;LINGEL KAREN;DISANTO MITCHELL;AMBAL HARI KISHORE;BUDIARTO EDWARD;APPLIED MATERIALS, INC. 发明人 RAVID ABRAHAM;EGAN TODD;LINGEL KAREN;DISANTO MITCHELL;AMBAL HARI KISHORE;BUDIARTO EDWARD
分类号 H04N7/18;G01B11/00 主分类号 H04N7/18
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