发明名称 POROUS CERAMIC TABLE
摘要 Disclosed is a porous ceramic table. The porous ceramic table according to an aspect of the present invention includes a center part in which vacuum and purge lines are formed and a porous absorption part made of porous ceramic at the circumference of the center part, wherein multiple lift pin holes are formed at the center part and the porous absorption part.
申请公布号 KR20140044652(A) 申请公布日期 2014.04.15
申请号 KR20120110884 申请日期 2012.10.05
申请人 WI-A CORPORATION 发明人 KOJI HASHIZUME;CHOI, WON YOUNG
分类号 H01L21/683;B23Q3/08 主分类号 H01L21/683
代理机构 代理人
主权项
地址