| 摘要 |
The present invention is to manufacture a DNA nanofluid channel using focused ion beam equipment composed of a focused ion beam column and a 5-axis nanostage; wherein the focused ion beam column is composed of a condensing lens and an objective lens which comprise a Ga liquid ion source, an ion beam extraction electrode, an ion beam suppression electrode, an aperture, and an Einzel lens, respectively. The width of a microfluid channel using existing pemtosecond laser cannot manufacture a nanofluid channel for analyzing DNA moleculars with a width of 100 nm or less because it has a band within dozens or hundreds micrometer. Also, existing focused ion beam equipment is inadequate to optimize a process for manufacturing various nanochannels because it is mainly optimized for device analysis. When a process for grating-patterning using the focused ion beam equipment is optimized, various types of bio chip nanoholes are manufacture by the generation of stable beam current of the Ga liquid ion beam source for the stabilization of j beams, a system for automatically controlling the voltage of the ion beam extraction electrode and the ion beam suppression electrode in a state where the current of a faraday cup is fixed, and a technology for the alignment of the ion beams and the microvibration of the nanostage. The present invention can manufacture various sizes of the nanochannels with a clear image for the surface of specimens and constant milling widths while maintaining a probe at constant current. The present invention is precisely machined by the development on the variable aperture, the nanostage, and an automatic focusing system of the ion beam current, and the software of the nanostage and a pattern generator. |
