发明名称 WAFER MOUNTING APPARATUS
摘要 A wafer mounting device of the present invention comprises a mounting means which has a ceramic block mounting at least one wafer, a flip means which transfers the wafer to the ceramic block, and a wafer pressurization means which selectively provides pressurization force to the wafer mounted on the ceramic block.
申请公布号 KR101383958(B1) 申请公布日期 2014.04.14
申请号 KR20130005845 申请日期 2013.01.18
申请人 LG SILTRON INCORPORATED 发明人 LEE, SEOK KEUN;PARK, CHI HO
分类号 H01L21/683;H01L21/304 主分类号 H01L21/683
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