发明名称 TESTING APPARATUS AND ACQUIRING METHOD OF TESTING CONDITION
摘要 The objective of the present invention is to reduce a gap between the results of a user′s environment and a tester′s environment. A determining unit (20) determines whether a DUT (1) passes or fails. A power source circuit (10) has variable characteristics and supplies a power signal to the DUT (1). A condition setting unit (40) executes a pilot test prior to performing a main test on the DUT (1) and obtains a testing condition in the main test. The condtion setting unit (40) can perform the following functions of: (a) measuring the characteristic of a first device on each of a plurality of pilot samples of the DUT (1) while the characteristic of the power source circuit (10) is close to a power characteristic of a user environment actually used by the DUT (1); (b) measuring the predetermined characteristics of a second device on each pilot sample while the characteristic of the power source circuit (10) is close to a power characteristic of a tester environment where the main test is executed; and (c) measuring a testing condition based on the first device characteristic and the second device characteristic. [Reference numerals] (10) Power source circuit; (40) Condition setting unit
申请公布号 KR20140044270(A) 申请公布日期 2014.04.14
申请号 KR20130117552 申请日期 2013.10.01
申请人 ADVANTEST CORPORATION;THE UNIVERSITY OF TOKYO 发明人 ISHIDA MASAHIRO;NAKURA TORU;KOMATSU SATOSHI;ASADA KUNIHIRO
分类号 G01R31/26;H01L21/66 主分类号 G01R31/26
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