| 摘要 |
A fitting device for connecting a fluid supply pipe is disclosed. The fitting device for connecting a fluid supply pipe according to an embodiment of the present invention includes a male connector and a nut. The male connector has a hollow for receiving a fluid supply pipe, and includes a screw part on the outer surface. The nut is screwed to the male connector to fix the fluid supply pipe inserted into the hollow. The male connector includes a first locking block protrusion on a surface that faces an end surface of the nut when the nut is screwed to the male connector. The nut includes a second locking block protrusion on the end surface. When the nut is screwed to the male connector, the second locking block protrusion meets the first locking block protrusion. The first locking block protrusion and the second locking block protrusion have slope surfaces that meet each other when the nut is screwed to the male connector, and vertical surfaces opposite to the slope surfaces. According to the present invention, since coupling of the male connector and the nut is locked, when the male connector and the nut are applied to a semiconductor apparatus, the nut is prevented from being unscrewed by vibration of a liquid chemical supply motor. |
