| 摘要 |
An inductively coupled plasma reactor is provided to improve controllability to plasma ion energy by improving magnetic flux transfer efficiency of an antenna. A reaction chamber(10) has a plasma discharge area. Multiple radio frequency antennas(30,32) have radio frequency antennas more than two. A power supply source(40) supplies the radio frequency. A power source division supply part(44) parallely divides the radio frequency supplied from the power supply source into two or more. The divided radio frequencies have phase difference. The power source division supply part supplies the divided radio frequencies to the multiple radio frequency antenna. The radio frequency antenna is provided with the radio frequency having the phase difference of the same frequency. |
