用于制程监控之电路元件结构,申请号TW100121013-传众专利搜索

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发明名称	用于制程监控之电路元件结构
摘要
申请公布号	TWI434361	申请公布日期	2014.04.11
申请号	TW100121013	申请日期	2011.06.16
申请人	矽品精密工业股份有限公司台中市潭子区大丰路3段123号	发明人	陈冠宇;方柏翔;蔡明泛;李信宏
分类号	H01L21/66;H01L21/67	主分类号	H01L21/66
代理机构		代理人	陈昭诚台北市中正区杭州南路1段15之1号9楼
主权项
地址	台中市潭子区大丰路3段123号

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