成膜装置和成膜方法,申请号TW100139150-传众专利搜索

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发明名称	成膜装置和成膜方法
摘要
申请公布号	TWI433946	申请公布日期	2014.04.11
申请号	TW100139150	申请日期	2011.10.27
申请人	佳能股份有限公司日本	发明人	中川善之;中野真吾;福田直人
分类号	C23C14/24;C23C14/54;G01B7/06	主分类号	C23C14/24
代理机构		代理人	林志刚台北市中山区南京东路2段125号7楼
主权项
地址	日本

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