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发明名称
氧化铟锡膜及其制作方法
摘要
申请公布号
TWI433945
申请公布日期
2014.04.11
申请号
TW100133361
申请日期
2011.09.16
申请人
光洋应用材料科技股份有限公司 台南市安南区工业三路1号
发明人
杨能辉
分类号
C23C14/08;C01G15/00;H01B5/14
主分类号
C23C14/08
代理机构
代理人
桂齐恒 台北市中山区长安东路2段112号9楼;林景郁 台北市中山区长安东路2段112号9楼
主权项
地址
台南市安南区工业三路1号
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