ISOLATING SEGMENTED RADIATION DETECTORS USING ALUMINA

摘要

Radiation detectors can be made of n-type (614) or p-type (114) silicon. All segmented detectors on p- type (114) silicon and double-sided detectors on n-type (614) silicon require an "inter-segment isolation" to separate the n-type strips (104) from each other; an alumina (506) layer for isolating the strip detectors is applied, and forms negative charges at the silicon interface (130) with appropriate densities. When alumina (506) dielectric is deposited on silicon 108, the negative interface charge acts like an effective p-stop (404) or p-spray (402) barrier because electrons are "pushed" away from the interface (130) due to the negative interface charge.