发明名称 |
PROCESS AND STRUCTURES FOR FABRICATION OF SOLAR CELLS |
摘要 |
Contact holes of solar cells are formed by laser ablation to accommodate various solar cell designs. Use of a laser to form the contact holes is facilitated by replacing films formed on the diffusion regions with a film that has substantially uniform thickness. Contact holes may be formed to deep diffusion regions to increase the laser ablation process margins. The laser configuration may be tailored to form contact holes through dielectric films of varying thicknesses. |
申请公布号 |
US2014096824(A1) |
申请公布日期 |
2014.04.10 |
申请号 |
US201314061584 |
申请日期 |
2013.10.23 |
申请人 |
SUNPOWER CORPORATION |
发明人 |
HARLEY GABRIEL;SMITH DAVID D.;DENNIS TIM;WALDHAUER ANN;KIM TAESEOK;COUSINS PETER JOHN |
分类号 |
H01L31/0224;H01L31/0216 |
主分类号 |
H01L31/0224 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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