发明名称 PHASE CHANGE MEMORY STRUCTURES AND METHODS
摘要 Methods, devices, and systems associated with phase change material memory are described herein. In one or more embodiments, a method of forming a phase change material memory cell includes forming a number of memory structure regions, wherein the memory structure regions include a bottom electrode material and a sacrificial material, forming a number of insulator regions between the number of memory structure regions, forming a number of openings between the number of insulator regions and forming a contoured surface on the number of insulator regions by removing the sacrificial material and a portion of the number of insulator regions, forming a number of dielectric spacers on the number of insulator regions, forming a contoured opening between the number of insulator regions and exposing the bottom electrode material by removing a portion of the number of dielectric spacers, and forming a phase change material in the opening between the number of insulator regions.
申请公布号 US2014097399(A1) 申请公布日期 2014.04.10
申请号 US201314051212 申请日期 2013.10.10
申请人 MICRON TECHNOLOGY, INC. 发明人 TANG SANH D.
分类号 H01L45/00 主分类号 H01L45/00
代理机构 代理人
主权项
地址