发明名称 HOLDING DEVICE FOR A PRODUCT AND TREATMENT METHOD
摘要 A holding device for a treatment of a product (5), which holding device comprises a first holding part (41) and a second holding part (42). The first holding part (41) comprises at least one first electrical contact element (13) for establishing a contact with a first side (6) of the product (5). The second holding part (42) comprises at least one second electrical contact element (14) for establishing a contact with a second side (7) of the product (5), which second side lies opposite the first side (6). The first holding part (41) and the second holding part (42) are arranged in such a way that they can be fastened to one another in a detachable manner for the purpose of holding the product (5). A product seal (15, 16) and a housing seal (17) provide a sealing arrangement to prevent the penetration of fluid into the at least one first electrical contact element (13) and the at least one second electrical contact element (14) in a treatment state.
申请公布号 WO2014053300(A1) 申请公布日期 2014.04.10
申请号 WO2013EP69117 申请日期 2013.09.16
申请人 ATOTECH DEUTSCHLAND GMBH 发明人 RAUENBUSCH, RALPH;THOMAS, CHRISTIAN;WEINHOLD, RAY;KLINGL, HEINZ
分类号 C25D17/00;C25D17/06;H01L21/67 主分类号 C25D17/00
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