| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck in which adhesion of an internal electrode layer and a ceramic dielectric substrate is enhanced, while enhancing conductivity of the internal electrode layer.SOLUTION: An electrostatic chuck includes a ceramic dielectric substrate of polycrystalline ceramic sintered compact having a first principal surface on which a processed object is mounted, and a second principal surface on the reverse side of the first principal surface, and an electrode layer interposed between the first and second principal surfaces of the ceramic dielectric substrate and sintered integrally therewith. The ceramic dielectric substrate has a first dielectric layer between the electrode layer and the first principal surface, and a second dielectric layer between the electrode layer and the second principal surface. The electrode layer has a first portion having conductivity, and a second portion bonding first and second conductive layers. Average grain size of a crystal included in the second portion is smaller than that of a crystal included in the ceramic dielectric substrate. |
