发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device capable of achieving miniaturization and to provide a method of manufacturing the same.SOLUTION: The semiconductor device includes: a semiconductor substrate 11 including a first-conductivity-type drain layer 17 and a second-conductivity-type base layer 18 provided on the drain layer; a gate electrode 15 provided in the semiconductor substrate and including a first portion; a gate insulating layer 14 provided between the gate electrode and the semiconductor substrate; an upper insulating layer 16 provided on the gate electrode; a first-conductivity-type source layer 19a provided on sidewalls of the upper insulating layer and having a width increasing toward the base layer; and a source electrode 21 provided on the source layer.
申请公布号 JP2014063852(A) 申请公布日期 2014.04.10
申请号 JP20120207556 申请日期 2012.09.20
申请人 TOSHIBA CORP 发明人 NOGAMI TAKUYA;OKUMURA HIDEKI;KONO TAKAHIRO
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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