| 摘要 |
PROBLEM TO BE SOLVED: To simplify a manufacturing process of a thin film transistor that is mounted on an EL display device.SOLUTION: A thin film transistor is manufactured as follows: a first conductive film, an insulating film, a semiconductor film, an impurity semiconductor film, and a second conductive film are stacked; a first resist mask is formed thereover; a thin-film stack body is formed by performing a first etching; a gate electrode layer is formed by performing a second etching including side etching to the thin-film stack body; and then a source electrode and a drain electrode layer and the like are formed using a second resist mask. By using this thin film transistor, an EL display device is manufactured. |
