| 摘要 |
<p>A capacitive displacement sensor comprises: a columnar member (31) formed from an insulating material; a metal cylindrical member (33) into which a prescribed region of the columnar member (31) is inserted and that moves in association with displacement of a spool (22); a pair of stationary electrodes (40A, 40B) formed into a thin film on the outer surface of the columnar member (31); compensation electrodes (41, 42) formed into a thin film on the outer surface of the columnar member (31); an electrostatic shield (37) that is grounded, and, in a state of being insulated from the stationary electrodes (40A, 40B), cylindrical member (33), and the compensation electrodes (41, 42), covers the electrodes; and stationary electrode terminals and compensation electrode terminals that are formed into a thin film on the outer surface of the columnar member (31), and that extend in a state of being insulated from the electrostatic shield (37), in the lengthwise direction, to the exterior of the electrostatic shield (37) contacting the each electrodes (40A, 40B, 41, 42).</p> |
