| 摘要 |
PURPOSE: A method for producing ZnO nano-sheets is provided to simply synthesize a ZnO nano-sheet without additional catalysts by exposing oxygen plasma on a thin zinc film. CONSTITUTION: A method for producing ZnO nano-sheets comprises the steps of: depositing a zinc film on a substrate(340), heating the substrate in a plasma enhanced chemical vapor deposition apparatus(300), directly exposing oxygen plasma created by a plasma generating device of the plasma enhanced chemical vapor deposition apparatus to the zinc film, and oxidizing the zinc film for a predetermined time to produce a ZnO nano-sheet. [Reference numerals] (AA) Zinc film |
