摘要 |
PROBLEM TO BE SOLVED: To provide a functionally graded film which can enhance hole injection efficiency for a luminous layer, when used in the anode of an organic thin film light-emitting element, and to provide a production method therefor.SOLUTION: Since the addition of V for ITO is increased gradually in the film thickness direction toward one surface thereof, the work function derived from the ITO, and the conductivity derived from the doped V are ensured in the vicinity of the surface. Furthermore, since a functionally graded film is composed by epitaxial growth in the film thickness direction, a junction interface does not exist on contrary to the case where a film of different structure is laminated. |