发明名称 |
ZINC OXIDE PRECURSOR AND METHOD OF DEPOSITING ZINC OXIDE-BASED THIN FILM USING THE SAME |
摘要 |
A zinc oxide (ZnO) precursor and a method of depositing a ZnO-based thin film using the same, with which a high-quality and high-purity ZnO-based thin film can be deposited. The ZnO precursor includes a mixture solvent containing at least two organic solvents which are mixed and a source material comprising diethyl zinc or dimethyl zinc which is diluted in the mixture solvent. |
申请公布号 |
US2014099443(A1) |
申请公布日期 |
2014.04.10 |
申请号 |
US201314049352 |
申请日期 |
2013.10.09 |
申请人 |
SAMSUNG CORNING PRECISION MATERIALS CO., LTD. |
发明人 |
PARK SOOHO;PARK JONGSE;YOO YOUNG ZO;LEE JOO YOUNG;KIM SEO HYUN;YOON GUN SANG;KIM MYONG WOON;SHIN HYUNG SOO;YOO SEUNG HO;LEE SANG DO;LEE SANG ICK;YIM SANG JUN |
分类号 |
H01B1/08;C23C16/40 |
主分类号 |
H01B1/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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