发明名称 METHOD AND APPARATUS FOR MATCHING TOOLS BASED ON TIME TRACE DATA
摘要 A method includes receiving tool trace data from a group of tools of the same type in a computing device. A tool fingerprint is generated for each tool using the tool trace data for the tools in group other than the tool for which the tool fingerprint is generated in the computing device. A tool score is generated for each tool based on its tool trace data and its associated fingerprint in the computing device. A fault condition with at least a selected tool is identified based on the tool scores in the computing device.
申请公布号 US2014100806(A1) 申请公布日期 2014.04.10
申请号 US201213644788 申请日期 2012.10.04
申请人 GLOBALFOUNDRIES INC. 发明人 GOOD RICHARD P.;SCHEPERS THORSTEN
分类号 G01N37/00;G06F19/00 主分类号 G01N37/00
代理机构 代理人
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