发明名称 IC CHIP JOINT METHOD
摘要 PROBLEM TO BE SOLVED: To provide an IC chip joint method having high reliability of contact of a base material to wiring.SOLUTION: In an IC chip joint method, an anisotropic conductive adhesive layer of thermosetting type is formed between a bump of an IC chip and a base material pattern and the IC chip and the base material are heated, pressed and joined together by holding them in place with an upper/lower head comprising an upper head provided with a heating unit disposed above the IC chip and able to move in the vertical direction and a lower head provided with a heating unit disposed below the base material and able to move in the vertical direction. The IC chip joint method includes: a placement step of mounting the bump of the IC chip on the base material pattern having conductive adhesive coated thereon; a preheating step (S16b, S16c) of preheating the coated conductive adhesive at a thermosetting temperature or below by causing the upper head to contact the IC chip or the lower head to contact the base material after the IC chip is placed; and a joint step (S22) of applying pressure by sandwiching with the upper/lower head after the preheating step to heat the conductive adhesive up to the thermosetting temperature.
申请公布号 JP2014063965(A) 申请公布日期 2014.04.10
申请号 JP20120209653 申请日期 2012.09.24
申请人 FUJITSU FRONTECH LTD 发明人 TSUNENO TATSURO
分类号 H01L21/60 主分类号 H01L21/60
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