SUBSTRATE TRANSFER DEVICE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE TRANSFER METHOD

摘要

PROBLEM TO BE SOLVED: To provide a technology capable of inhibiting a lower surface of a substrate from contacting with a hand at positions other than a specified position.SOLUTION: A transfer robot CR includes: a hand 24 which holds a substrate W; and a hand drive mechanism 240 which drives the hand 24. The hand 24 includes: a horizontal support part 72 horizontally extending; multiple contact members 73 which are provided on an upper surface 720 of the horizontal support part 72 so as to be spaced away from each other, contact with the substrate W, and support the substrate W at a position separated from the upper surface 720 of the horizontal support part 72; and a gas discharge part 700 which discharges a gas toward a lower surface of the substrate W supported above the horizontal support part 72.