| 摘要 |
PROBLEM TO BE SOLVED: To provide an easy-to-vibrate vibrator, by suppressing increase in additional capacity due to cross wiring in a base.SOLUTION: A tuning-fork vibration piece 1 comprises: lower electrode films 15a, 16a, and 17a provided on vibration arms 11, 12, and 13 extending from the base 14; upper electrode films 15c, 16c, and 17c provided above the lower electrode; and piezoelectric films 15b2, 16b2, and 17b2 provided, as insulation layers, between the lower electrodes and upper electrode. The piezoelectric films 15b2, 16b2, and 17b2 provided above the base 14 has a thickness thicker than that of the piezoelectric films 15b2', 16b2', and 17b2' provided above the vibration arms 11, 12, and 13. |
