DEVICE FOR RECOVERING SICL4 SLURRY AND METHOD FOR THE SAME

摘要

A device for recovering SiCl4 slurry and method for the same, comprising a paddle dryer for receiving SiCl4 slurry containing chlorosilane; a first spray scrubber for receiving exhaust gas from the paddle dryer; a condenser for condensing and recovering the purifying exhaust gas from the first spray scrubber and discharging supersaturated vapor that after condensation and separation; a defogging separator for removing liquid droplets from supersaturated vapor which is cooled by the condenser; a hydrolysis tank for receiving and hydrolyzing a paste-like slurry from the paddle dryer and vapor from the defogging separator to produce mixture and exhaust gas; a drum pressure filter for receiving neutralization products from a neutralization stirring tank.