| 摘要 |
<p>A supporting unit for a substrate and a substrate processing apparatus using the same are disclosed. In the supporting unit for a substrate and the substrate processing apparatus using the same, because one end of a supporting bar of a supporting member for supporting the central part of a substrate is firmly combined with a supporting board, the other end of the supporting bar does not sag relatively. Because the center pat of the substrate is firmed supported by the supporting bar, the deformation of the substrate can be prevented. In addition, an arm of a robot, which loads the substrate in the supporting unit or unloads the substrate from the supporting unit during moving into and out of the supporting unit, is not interrupted by the supporting bar so that the damage to the supporting unit or the arm of the robot can be prevented.</p> |
