DLC COATING METHOD FOR SUBSTRATE HAVING MICRO STRUCTURE AND SUBSTRATE MANUFACTURED BY THE METHOD

摘要

Disclosed is a micro structure DLC coating method comprising a step for coating a substrate having a micro structure by physical vapor deposition (PVD), or chemical vapor deposition (CVD) as fluorine-doped diamond-like carbon (DLC). In the coating step, mixture gas where gas containing a fluorine (F) element and carbon source gas are mixed is injected into a PVD or CVD system in which the substrate having a micro structure is located, and an ion gun or plasma resolves the mixture gas, so the DLC coating is performed. [Reference numerals] (AA) Start; (BB) End; (S301) Arrange a substrate having a micro structure in a deposition system; (S303) Wash a base material having the micro structure at argon (Ar) atmosphere; (S305) Inject gas containing fluorine (F) and C_2H_2 gas; (S307) Resolve gas by using an ion gun or plasma