发明名称 METHOD OF FABRICATING FOR VERTICAL LIGHT EMITTING DIODE
摘要 A method for fabricating a vertical type light emitting diode is provided to remove the whole substrate uniformly by minimizing the impact when separating a substrate by the laser irradiation by exposing a part of interfaces between a substrate and a semiconductor layer. A semiconductor layer(60) includes a first semiconductor layer(30), an active layer(40), and a second semiconductor layer(50). The semiconductor layer is formed on a substrate(10). At least one groove(70) or more are formed in a region corresponding to an effective irradiation area of the laser. The groove is formed over an outer part of the effective irradiation area of the other adjacent laser.
申请公布号 KR101383358(B1) 申请公布日期 2014.04.10
申请号 KR20070105622 申请日期 2007.10.19
申请人 发明人
分类号 H01L33/12 主分类号 H01L33/12
代理机构 代理人
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