发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device which can reduce saturation current sensitivity to variation in gate voltage without an adverse effect.SOLUTION: A semiconductor device according to the present embodiment of the present application comprises: a channel layer 12 formed on a substrate; an insulation layer 20 formed in contact with the channel layer 12; an impurity-doped first semiconductor layer 22 formed on the insulation layer 20 on the opposite side to the channel layer 12; an impurity-doped second semiconductor layer 24 formed on the first semiconductor layer 22 on the opposite side to the insulation layer 20; and gate electrodes 26 formed on the second semiconductor layer 24 on the opposite side to the first semiconductor layer 22. A value obtained by division of an impurity density of the first semiconductor layer 22 by a dielectric constant of the first semiconductor layer 22 is larger than a value obtained by division of an impurity density of the second semiconductor layer 24 by a dielectric constant of the second semiconductor layer 24.
申请公布号 JP2014063841(A) 申请公布日期 2014.04.10
申请号 JP20120207393 申请日期 2012.09.20
申请人 MITSUBISHI ELECTRIC CORP 发明人 KUSUNOKI SHIGERU
分类号 H01L29/78;H01L29/12;H01L29/41;H01L29/423;H01L29/49;H01L29/739 主分类号 H01L29/78
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