| 摘要 |
PROBLEM TO BE SOLVED: To provide a coater capable of reducing film thickness irregularity caused by non-uniformity of an evaporation rate of a solvent during coating or immediately after coating.SOLUTION: The coater includes a stage on which a substrate is installed, a nozzle at which a discharge port that discharges a coating liquid onto the substrate is formed, a movement mechanism capable of relatively moving the stage and the nozzle in a surface direction of the substrate, and an air flow generating part that generates an air flow near the nozzle, where the air flow generating part includes an opening that extends in the direction of the nozzle movement, and generates a sheet-like air flow from the opening to the neighborhood of the nozzle. |
