| 摘要 |
This spectral characteristic measurement device is provided with: an incidence optical system which causes measurement light emitted from a plurality of measurement points within an object to be measured to be incident on a reflection surface of a fixed reflection part and a reflection surface of a movable reflection part; an imaging optical system which guides fixed reflected measurement light reflected by the reflection surface of the fixed reflection part and movable reflected measurement light reflected by the reflection surface of the movable reflection part to the same point and forms interference light between both the reflection measurement lights; a light detection unit which has a plurality of pixels for detecting the intensity of the interference light; a transmission filter which is disposed in a light path between the imaging optical system and the light detection unit, has a plurality of regions with different transmittances, and is configured such that the fixed reflected measurement light and the movable reflected measurement light that form the interference light to be incident on the respective pixels of the light detection unit are transmitted through the same region; and an arithmetic processing unit which finds the interferogram of the measurement light from the detection signals of the respective pixels of the light detection unit when the movable reflection part is moved, and finds the spectrum of the measurement light on the basis of the interferogram. |
