| 摘要 |
The present invention relates to a chuck table capable of properly holding a workpiece that is bent. A chuck table (15) for holding a workpiece (W) includes a suction part (153) having a suction surface (153a) to suck and hold the workpiece, and an annular seal part (154) that is formed of an elastic material to surround the suction part and supports an outer circumference (W2) of the workpiece. The suction part is connected with a negative pressure generating unit to generate suction force on the suction surface, and the annular seal part has a top surface (154a) with a height higher than that of the suction surface. When the workpiece is held by suction, the negative pressure leaking from the gap between the workpiece and the suction surface is applied to a space formed by contact between the outer circumference part of the workpiece and the annular seal part, so that the workpiece is deformed and the surface becomes a plane surface. |
