PROCESS OF MANUFACTURING ZINC OXIDE CRYSTAL LAYER, ZINC OXIDE CRYSTAL LAYER, AND MIST CHEMICAL VAPOR DEPOSITION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method of forming a zinc oxide crystal layer on a nonpolar surface of a sapphire substrate at low cost.SOLUTION: The process of manufacturing a zinc oxide crystal layer includes: transporting a mist generated by atomizing a raw material solution containing a zinc oxide precursor with a carrier gas; and growing a zinc oxide crystal on a sapphire substrate whose crystal plane at a surface is either a-plane or m-plane by a mist chemical vapor deposition method that forms a layer composed of a zinc oxide by a thermochemical reaction on the substrate.