| 摘要 |
PROBLEM TO BE SOLVED: To detect a recessed portion and a protruded portion of a sample to determine if the detected portion is a recess or a protrusion.SOLUTION: A recess detection unit detects, as a recess recessed from an imaging surface, each of portions 203d and 201d in which a proximity image 203c has a large luminance value that is photographed while a focal position of an object lens 31 is moved to a proximity position, and a separation image 201c has a small luminance value that is photographed while the focal position is moved to a separation position. A protrusion detection unit detects, as a protrusion protruding from the imaging surface, each of portions 201b and 203b in which a separation image 201a has a large luminance value and the proximity image 203a has a small luminance value. |
