ANTENNA AND PLASMA PROCESSING APPARATUS

摘要

This antenna is provided with a dielectric material window (16), and a slot plate (20) that is provided on one surface of the dielectric material window (16). The slot plate (20) has a plurality of slot pairs each of which is configured from two slots. The slot pairs are concentrically disposed with the gravity center position of the slot plate (20) at the center. The slot pairs are provided at positions where axis lines extending toward the slot pairs from the gravity center position of the slot plate (20) do not overlap each other.