发明名称 Singulation Processes
摘要 In one embodiment, a method of forming a semiconductor device comprises forming a groove on and/or over a first side of a substrate. A dicing layer is formed from a second side of the substrate using a laser process. The second side is opposite the first side. The dicing layer is disposed under the groove within the substrate. The substrate is singulated through the dicing layer.
申请公布号 US2014099777(A1) 申请公布日期 2014.04.10
申请号 US201213648216 申请日期 2012.10.09
申请人 INFINEON TECHNOLOGIES AG 发明人 MACKH GUNTHER;HEIDENBLUT MARIA;KOLLER ADOLF;SOTNIKOV ANATOLY
分类号 H01L21/78 主分类号 H01L21/78
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