| 摘要 |
A ion-plasma device of the integrated type for treatment of the internal surfaces comprises two plasma magnetron-type devices with respective power supply systems, which are mounted in the inner cavity of the treated workpiece coaxially with it, cathodes of the magnetron devices have a conical shape with oppositely oriented conical peaks, between which the general disc anode is mounted on the axis of the system and the inner magnetic poles of the magnetron units have the opposite polarity. One of the integrated ion-plasma devices is a magnetron spraying system with a conical cathode, and the other is an independent source of gas ions with closed electron drift containing a magnetic system with water cooling system and the magnetic poles located on the conical surface, which is oriented oppositely to the cathode of the conical magnetron spraying system, and in the cavity of the magnetic system of an independent source of gas ions, at a minimum distance from its magnetic poles the anode gas distributor is mounted with the gas supply pipe and the current lead. |
