METHOD OF MANUFACTURING METAL COMPOUND POWDER, CALCINED POWDER, AND SPUTTERING TARGET

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a metal compound powder capable of efficiently manufacturing a metal compound powder contaminated with no halogen element, uniform in particle size, and narrow in particle size distribution, a calcined powder obtained by heat-treating the metal compound powder prepared by the method of manufacturing, and a sputtering target containing the calcined powder.SOLUTION: A metal compound powder 12 is precipitated in an electrolytic solution 4 by electrolytic reaction using an anode 3 constituted by melting an elementary metal or an alloy, and the electrolytic solution 4 containing no halogen element.