| 摘要 |
An antioxidant gas blow-off unit is characterized by including a hollow plate-like base part (20) in which an antioxidant gas passage (30) is formed; a hole (24) which is provided in the base part (20) to allow a capillary to be inserted thereinto and pulled therefrom and communicates with the antioxidant gas passage (30); and a plurality of electrodes (75a, 75b) which is buried in a wall (21w) of the base part (20) near the hole (24) to generate plasma from the antioxidant gas. Thereby, the quality of bonding can be further improved in a wire bonding device. |
