| 摘要 |
<p>Provided is a substrate firing device with which outside cold air does not flow into the device and sublimates are not formed when an opening/closing lid is opened. This substrate firing device (1) is constructed such that hot air blowing parts (8), which blow hot air downward along the upper part of heating chambers (3) from the vicinity of insertion/removal ports (4) where opening/closing lids (5) open, are provided, and such that suction parts (7), which draw in the air containing the hot air that has been blown, are provided in the vicinity of and under the insertion/removal ports.</p> |
