TEST STRUCTURE FOR ASSESSMENT OF RADIUS OF CURVATURE OF NEEDLE EDGE OF CANTILEVER OF SCANNING PROBING MICROSCOPE

摘要

FIELD: measuring equipment.SUBSTANCE: test structure consists of base containing a near-surface layer. The near-surface layer has a relief cellular structure with dense packing. The adjacent cells have the common wall, and each cell is at least five-wall. Walls of each cell are located vertically, and the upper edges of walls of cells have a concave form. The test structure contains the edges having radius of curvature of tops of a nanometer range. Edges are executed by connection in central places of three top edges of walls of various cells. Edges at tops are executed from titanium oxide. The near-surface layer of the basis is executed from titanium. The base can be executed from titanium. The basis also can be executed in the form of a substrate, on which the film of titanium containing a near-surface layer of the basis is located.EFFECT: reproducibility increase in determination of radius of curvature of an edge of a needle in a cantilever.2 cl, 2 dwg