PROCESSING APPARATUS, METHOD FOR PRODUCING PROCESSING LIQUID, AND METHOD FOR PRODUCING ELECTRONIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a processing apparatus with which productivity of a processing liquid is increased, a method for producing the processing liquid, and a method for producing an electronic device.SOLUTION: A Processing apparatus includes: an electrolysis part in which an anode electrode and a cathode electrode are installed and which electrolyzes a solution including alkali without metal, hydrochloric acid, and water; an alkali addition part to further add alkali without metal to the electrolyzed solution; and a processing part to process an object by using the solution to which the alkali without metal has been added.