| 摘要 |
<p>A laser system comprises a first laser (14) producing a working laser beam, a second laser (18) producing a sensing laser beam, first (26) and second (28) optical elements, an optical sensor (48), an aperture (44) and a controller (20). The first optical element (26) generates a coaxial beam from the working laser beam (14) and the sensing laser beam (18). The second optical element (28) focuses the coaxial beam onto a workpiece (11), such that the working laser beam machines the workpiece (11) and the sensing laser beam reflects from the workpiece (11). The optical sensor (48) senses an intensity of the reflected sensing beam. The aperture (44) determines a focus position by translating along the reflected sensing beam, such that the reflected intensity is maximized. The controller (20) determines a machining parameter of the working laser beam, based on the focus position, and may control the first laser (14).</p> |
