CREATION METHOD, CREATION PROGRAM, AND CREATION DEVICE FOR CHARACTERISTIC AMOUNT OF PATTERN OR FP

摘要

An object is to improve the accuracy and the efficiency of an evaluation of a multicomponent material. Provided are a target FP preparing step 173, a target FP peak assigning step 149, a target FP peak feature value preparing step 151, a target FP type-2 preparing step 153, a target FP area segmentation feature value preparing step 155, a target FP feature value integrating step 157, and an evaluating step 171, to prepare target FP integrated feature values by integrating target FP peak feature values and target FP area segmentation feature values, and to compare and evaluate the target FP integrated feature values and reference FP integrated feature values that correspond to the target FP integrated feature values and are based on a plurality of reference FPs of multicomponent materials as evaluation criteria.