| 发明名称 |
DEVICE AND METHOD FOR PRODUCING HIGHLY POROUS, CRYSTALLINE SURFACE COATINGS |
| 摘要 |
<p>The present invention relates to a device, the use thereof and a method for producing highly porous, crystalline surface coatings comprising at least two spraying devices operating in sequential sequence for applying coating agents from the storage vessels (3, 4) to a material arranged on a sample holder (1) and at least one rinsing device (5, 13, 16) for removing unbound molecules from the coated surface.</p> |
| 申请公布号 |
EP2714286(A1) |
申请公布日期 |
2014.04.09 |
| 申请号 |
EP20120727331 |
申请日期 |
2012.05.25 |
| 申请人 |
KARLSRUHER INSTITUT FUER TECHNOLOGIE |
发明人 |
WÖLL, CHRISTOF;SHEKHAH, OSAMA;FRANZREB, MATTHIAS;ARSLAN, HASAN;WOHLGEMUTH, JONAS;FISCHER, ROLAND |
| 分类号 |
B05D7/24;B01D67/00;B01D71/00;B05B7/24;B05D1/02;B05D1/38;B05D3/04;H01L21/67 |
主分类号 |
B05D7/24 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
